INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 202
p STC-2002
DEPOSITION CONTROLLER
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SECTION 6.XX
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Parameter 8
Setpoint Time Lim
it
access:
SPTM
Value Range
0:00 - 99:59
Units
Min:Sec
The setpoint time limit parameter is used to provide a comparison point for the STC-2002
timer setpoint event status.
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Parameter 9
Soak 1 P
o
w
e
r Value
access:
PWR1 power condition power level 1
Value Range
0.0 - 100.0
Units
Percent
This parameter sets the deposition source power value to be used as the first level of soak
power in the pre-deposition cycle. This power level will be maintained for the duration of
the soak 1 timer. This level is typically used to out gas and condition the source material.
A value of 0.0% causes the rise/soak 1 phase to be skipped.
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Parameter 10
P
o
w
e
r Ramp 1 Time
access:
RMP1 ramp time to power level 1
Value Range
0:00 - 99:59
Units
Min:Sec
This parameter sets the duration of the power ramp from zero power to the power level
set by the soak 1 power value parameter.
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Parameter 11
P
o
w
e
r Soak 1 Time
access:
SKT1 soak time at power level 1
Value Range
0:00 - 99:59
Units
Min:Sec
This parameter sets the time that the source will remain at the soak 1 power level
following the completion of the ramp to this level.
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Parameter 12
Soak 2 P
o
w
e
r Value
access:
PWR2 power condition power level 2
Value Range
0.0 - 100.0
Units
Percent
This parameter sets the deposition source power value to be used as the second level of
soak power in the pre-deposition cycle. This power level will be maintained for the
duration of the soak 2 timer. A value of 0.0% skips the rise/soak 2 phases.
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Parameter 13
P
o
w
e
r Ramp 2 Time
access:
RMP2 ramp time to power level 2
Value Range
0:00 - 99:59
Units
Min:Sec
This parameter sets the duration of the power ramp from the soak 1 power value or the
idle power value to the value set by the soak 2 power parameter.
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Parameter 14
P
o
w
e
r Soak 2 Time
access:
SKT2 soak time at power level 2