INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 208)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 206 of 276 ^
access: PSEL Pocket select 0..63
Value Range 0 – 63
Units Pockets
This parameter selects the type of information to be displayed on the RunTime graphics
screen.
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Parameter 46
ETCHING MODE
access: FRATDR Film Rate Direction/EtchMode if true, otherwise deposit.
Value Range OFF/ON
Units None
When ON, this parameter selects the deposition controller perspective such that a
negative (etching) process will be indicated with positive values and that setpoints, etc.
will trigger based on these values. When OFF deposition will be indicated with positive
values.
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Read, Write Film Parameters Examples
Command Examples
Command
A1 25 or A 1,25 or A 1 25
Response A0.0
Description
To Request Film 1, Parameter 25 The Max. Power Limit Parameter. The Current
Parameter Setting, In This Case 0.0 %.
Command A9
18
Response A0
Description
To Request Film 9, Parameter 18, Rate Ramp Mode. Rate Ramp Mode is Off.
Command
B1 25=50.2 or B 1,25 = 50.2
Response A
Description
To Set Film 1, Parameter 25 (The Max. Power Limit Parameter) To 50.2 %. Message
Understood And Accepted.
Command B1
25=100.4
Response H
Description
To Set The Parameter To A Value Exceeding 100%, Which is Illegal! Response is
Signifying An Illegal Data Value Being Used, command ignored.
Table 6.9: Group 2 Examples.
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SECTION 6.8
Read, Write System Parameters Group 3--
Commands C & D
Read, Write System Parameters