INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 212)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 210 of 276 ^
Parameter 19 NA access value: OBSO Was bit bus address.
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Parameter 20 NA access value: OBSO Was gpib checksum control param code.
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Parameter 21 NA access value: OBSO Was line frequency param code.
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Parameter 22 Sequence Inhibit Inhibit Sequence Mode
access value: SQINH sequence inhibit, set true when cant sequence, Needs reset.
Value Range 0,1
Units None
This parameter (when set to 1) allows a STC-2002 to operate like a non SQ. This can be polled/set via
RS232 or changed on the SERVICE menu (see Section 2).
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Parameter 23
Recorder Out Ch a n ne l
access value: ROUTS Analog output channel select, when ARFNC not off, then active datalogging
value output to analog channel 1..8 providing no conflict with process control.
Units None
1 – 8 selects an analog output channel for use (if not off and not used as a source)
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Parameter 24
Need S ource /S ensor Card 1
access value: REQSS1 Require Source/Sensor 1 in system, boolean 0/1
Value Range OFF/ON
Units None
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Parameter 25
Need S ource /S ensor Card 2
access value: REQSS2 Require Source/Sensor 2 in system, boolean 0/1
Value Range OFF/ON
Units None
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Parameter 26
Need S ource /S ensor Card 3
access value: REQSS3 Require Source/Sensor 3 in system, boolean 0/1
Value Range OFF/ON
Units None
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Parameter 27
Need S ource /S ensor Card 4
access value: REQSS4 Require Source/Sensor 4 in system, boolean 0/1
Value Range OFF/ON
Units None
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Parameter 28
I/O Slot 1 Type
access value: REQIO1 Require Input/Output 1 in system, CFGIOS_class DSBL/Inp/Outp
Value Range UNUS ED (DISABLED) / INPUT / OUTPUT
Units None
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Parameter 29
I/O Slot 2 Type
access value: REQIO2 Require Input/Output 2 in system, CFGIOS_class