INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 21)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 1.XX e page 19 of 276 ^
MAP# Film Parameter: Review S ource /S ensor Map Select
SRC x Review S ource /S ensor Map Parameter: Source Analog Out put Ch a n ne l
Film Parameter: S ource /S ensor Map Select (select the map that
contains the above selected Source Analog Out put Ch a n ne l)
NOTE: If SRC is zero, this is an indication that a source analog output control voltage
has been assigned to a source sensor card that is not present, not working, etc.
Remember that the System Config
uration parameters: Need S ource /S ensor Card X and
I/O Slot X type are only evaluated on power up or on reset. Check the OPT ions /INF o
menu, page 2 and 3 to see what is currently in effect. To work correctly, the S/S x: line
should end with OK. If it ends with EMPTY, the card is not present or not
communicating. If the line ends with INCOMPAT
able !, the software versions in at least
some of the various PCB cards is not compatible- check for field changed PCB cards. If
the line ends with MIA, that sensor card is configured but is not present. [See
OPT
ions /INF o menu]
RUN, PHASE automatic up/down timers. Function when process/film is started
(START key sequence). Effected by film parameters that control film
phases within the deposition cycle.
RUN x System Configuration Parameter: Run Number
TIME/Day of Week/DATE System Configuration Parameters: Clock Time, Clock Date
Graph Film Parameters: Plot Vert Sc a l e V olts, Plot Hor i z Sc a l e H,
Data Plot Type
(process start) Carry out the following 2 key sequence up to 3 times.
Press the fixed front panel START key + 1 of 4 touch panel keys:
Break Wait, Next Layer, Restart Layer, Reset / Start Process
(see figure in end of section 3.0). Use the appropriate touch key for the
task at hand. If unsure, use Reset / Start Process key in all 3 sequences.
Please read and understand this manual before starting a live process.
(Test mode) [to enter] Service Menu: Test Off ⇒ Test On (text toggles) + Accept
(Test mode) [to exit] Service Menu: Arm Reset ⇒ Reset Armed (text toggles) + Accept
Password Dependencies:
(Communications values) Main Menu/ Executive Menu/ Comm unications Setup: Com/IO Lock
Code [non-zero value enables the password dependency and is itself the
password.]**
(I/O parameters) Main Menu/ Executive Menu/ Comm unications Setup: Com/IO Lock
Code [non-zero value enables the password dependency and is itself the
password.]**
(all other parameters) Main Menu/ Executive Menu/ System Config uration : Password Lock #
[non-zero value enables the password dependency and is itself the
password.]**
**Note: If password is forgotten and programming has not been saved in some
other media, call factory to eliminate passwords without purging memory.
SECTION 1.9
.
sensor specs (1.5) .