INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 115

p STC-2002

DEPOSITION CONTROLLER

SECTION 3.XX

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differentiation in that if it is followed by two periods, this means that there is no sensor card installed for
this crystal channel, otherwise the presence of 2 zeroes indicates that the sensor card is installed and
enabled (by menu parameter) and in an OFF condition.

general form:

XYYXZZ

where X=Letter Code, YY= starting XTAL%, ZZ= ending XTAL%

starting group

ending group

XTAL 1 A91A89 = Crystal 1 started a process as active at 91% life and ended a process as active at 89% life.
XTAL 3 A97F71 = Crystal 3 started a process as active at 97% life and ended a process as failed at 71% life.
XTAL 5 O00O00 = Crystal 5 started a process as OFF at zero% life and ended a process as OFF at zero%
life (00 usually indicates that no crystal is connected).

XTAL 7 O21O021 = Crystal 7 started a process as OFF at 21% life and ended a process as OFF at 21% life.
XTAL 8 O..O..

= Crystal 8 is OFF and has no supporting sensor card installed.

The vital parameters stored and displayed are:

RUN:

Run number - increments at the start of each process cycle (beginning at layer #1).**

DATE:

MMDDYY representation of date the film was started.

TIME:

The time of the start of the run (from the 24 hour clock of the STC-2002).

P TIME:

Process time - the time from a Start initiation to end of the Film Process.

COMPLT:

Mode of completion of the deposition.
NORMAL-

Normal completion of run

TMPWR-

Xtal failure occurred, run completed on time-power *

BADXTL-

Bad Xtal terminated run

REMOTE-

External input terminated run

KEYBRD-

Front keypad STOP BUTTON terminated run

MAXPWR-

MAX POWER limit exceeded, run terminated *

PENDNT-

STOP button on Hand Controller terminated run

FILM#

Film # used

PROC#

Process# used

LAYER#

Layer # used

MAP#

Map#

used

SRC#

Source channel # used

Pocket # (of indexer) used

D TIME:

Deposition time - the time the source shutter is open in Minutes:Seconds format.

THICK:

Thickness at end of deposition in Angstroms.

RATE:

Deposition rate at end of deposition in Å/Sec.

POWER:

Deposition power for last three seconds of deposition in %.

LOOP:

Accumulated counts in the control quality accumulator. See Section x2.17 for a
description of this value.

XTAL 1:

The start and ending crystal percent life is shown. See letter code table below.

XTAL 2:

Same as above.

XTAL 3:

Same as above.

XTAL 4:

Same as above.

XTAL 5:

Same as above.

XTAL 6:

Same as above.

XTAL 7:

Same as above.

XTAL 8:

Same as above.

* programmable feature

** The letter T appears after the run# when the TEST mode was used.

Note: [STAB: Accumulated counts in the crystal stability accumulator not reported here. See 2

STATUS screen.]

Purge will clear Process Accounting contents (see section x2.6x, Factory Settings vs... and section x2.21,
Check Sum Validation).

Crystal % Life Letter Code Table
O = Off

M = Missing

A = Active

B = Standby

D = Dropped

S = Switched

F = Failed