INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
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DEPOSITION CONTROLLER
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SECTION 1.XX
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SECTION 1.7
PRODUCT SPECIFICATIONS
STC-2002 Thin-Film Thickness and Rate Controller Specifications
High Resolution
±0.02Hz(5-6MHz), 0.0088 Angstroms/Measurement (for Aluminum)
High Accuracy
±0.5% thickness + 1 count
High
Speed
Ten
measurements/second
Measurement Range
500KA Aluminum Equivalent
Standard Sensor Crystal
6 MHz AT cut, Plano/Convex
Sensor Capacity
2 per sensor PCB card [4 PCB cards max.]
Displays
240 x 64 pixel monochrome LCD with Backlight
12 digit LED display (7 segments each digit)
4 discrete indicator LEDs
Operation Menu
driven
"Windowing
Type"
LCD
Touch
Panel
(12
x
4
key
matrix)
with 6 fixed function membrane keys
and 4 user programmable fixed membrane keys
Film Storage (Standard)
1 Active Film Program
98 Alternate Film Programs (with 30 Sensor maps)
9 Sequence recipes, 99 steps per recipe, system total is 250 steps
External Storage (Optional)
Film Parameters for films 1-99 and System Parameters I/O programs,
and Process Accounting Can be stored in Transportable Data Module
(Optional)
Hardware I/O (Standard)
per card: 8 SPDT Relays, 1.0 Amp @ 24 VDC Maximum
per card: 8 Optocoupled Inputs (Electrically Isolated), 5-24VDC [4
slots for input and/or output cards]
Computer Interface
RS-232C (Sycon Format or ASCII)
Protocols
Communication Options
DeviceNet, PROFIBUS, CANopen, others
Analog Outputs:
12 bit resolution (2 per sensor card, each for use as control or recorder)
As Control Outputs
2.5, 5, 10 volt @10ma. isolated output with range
menu programmable (maximum 2 control outputs per sensor card)
As Recorder Outputs
0 to 10 volt @ 10ma, isolated, function programmable
(rate, thickness, power, deviation, computer remote) (maximum 1
recorder output per sensor card and per system)
Power Control:
Automatic
Three Mode Closed Loop Control (PID)
Manual
Hand
Controller
Rack Mount
full width rack mount (std.). 3
1/2
" H, 8
5/8
" D
Power Requirements
90-264VAC, 50-60Hz (
1.4A rms@120VAC, 0.7A rms@230VAC)
Weight (without options)
6 lbs. [with: 1 Sensor card, 1 Input Card, 1 Output Card]
Sensor
card=0.216 lbs., Input card=0.135 lbs., Output card=0.14 lbs.
Operating Range
0 to 50°C ambient (power supply/LCD display)
Humidity
non-condensing: 5% - 85% RH