INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
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p STC-2002
DEPOSITION CONTROLLER
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SECTION 6.XX
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Command W1
13
Response A
Description
Command to erase step 13 of process 1 is successful.
Command X1
89=1
Response A
Description
Command to insert a step in a process has succeeded. Any step which were already at or
after the 89
th
step have been renumbered so as to follow step 89. If the last preexisting step was less than
89, the inserted step is placed at the previous last step plus one. For example, if prior to the X1, 89=1
command above the last step was 3, then a new step 4 was created.
Command Y1
13
Response A1
Description
Command to query step 13 of process 1 is successful. The 1 value indicates the step is
occupied and is an AUTO step.
Command Z1
13=2
Response A
Description
Command to reprogram step 13 of process 1 is successful. The new mode of the step is
WAIT.
Command a9
3
Response A4
Description
Command to query step 3 of process 9 is successful. The numeric return of 4 indicates
film 4 is the active film for step 3 of process 9.
Command b4,5=6
Response A4
Description
Command to set step 5 of process 4 to film #6 is successful.
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Measurement Substitution Group
Group 14 –
Commands e,f,g
These commands substitute or over-ride measurement modes.
(e) - Over-rides thickness measurement.
(f) - Substitutes measurement mode.
(g) - Substitutes rate measurement mode.
Measurement Substitution Group(e,f,g)
The
‘e’ command either queries (if parameter is ?) or sets the measurement override system. A
setting of 0 disables the override and allows the system to make measurements from the crystal sensor. A
value of 1 selects thickness override and the STC-2002 uses thickness values provided via the
communications link using the (‘f’) command below. A value of 2 selects rate override mode, where the
‘f’ command updates rate information, and this rate is integrated to produce thickness update within the
instrument. A value of 3 selects dual override, where both datum are substituted, with the thickness value
sent with the ‘f’ command, and the rate encoded with the ‘g’ command.
Measurement Substitution Group