INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
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p STC-2002
DEPOSITION CONTROLLER
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SECTION 6.XX
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above, any non-zero VAL value is interpreted as TRUE.
3
0..1
Make the non-SQ unit type act as SEQ (B) after rebooting. Like ID 1
above, any non-zero VAL value is interpreted as TRUE. NOTE: no more
than one of the two ID 2 and 3 values above should be set to TRUE (1),
since they are mutually contradictory. Both can be set to FALSE (the
default) since no action would then be taken during the next reboot. If both
options are set to TRUE, then the ID # 3 option (act like sequencing) has
the priority, and the unit will power up in a SQ capable mode.
4
0..4
Want a power up force of data base to other than remembered nonvolatile
state. The five value choices of 0,1, 2, 3 and 4 correspond to the following
meanings:
Value
Access
Description
0
PRGMOD_as is
leave memory state as is. The default state,
in effect, take no action.
1
PRGMOD_purged
everything set to forgotten default values.
safe. The unit will have no usefull program
content and will need programming by the
customer.
2
PRGMOD_factory
everything set to as if RS232 download,
same as purge above, except the I/O
program is left alone and certain film and
sys. configuration parameters are
preloaded to allow the customer to run
simple film operations as in instruction
manual.
3
PRGMOD_clone
program STC-2002 from memory module
contents
4
PRGMOD_archive
save STC-2002 programming to memory
module
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Command: m
Mnemonic: EXCT_SSMAP_QRY
Parameters:
either
Description:
Command to query the multichannel Source/Sensor map parameters used to configure the
measurement process applied to a film. SSMAP# is an integer, 1..9, identifying which map is being
interrogated. The second parameter, when in the range of 1..8, indicates a sensor channel (crystal head)
configuration is targeted, with the third parameter CPARM# ranging from 1..N (see table of
SnsChnlAtrb_class SCA_xxx_G values below). The second parameter, when in the range of 9..N, will
associate with the sensor map SPID_OUTFS (FIRST_GENERIC_SENSOR_MAP_P) thru
LAST_GENERIC_SENSOR_MAP_P (SPID_SFAILM) value per the SPARM# table below.
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Table of Sensor Map non-channel related parameter SPARM#s for second parameter in range of 9..N
SPARM# Label
Description
9
OUTFS
Source output full scale volt. Is an enumeration value of CFSV_class
0
CFSV_2V
2.5 volts full scale.
1
CFSV_5V
5 volts F.S.
2
CFSV_10V
10 volts F.S.