INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 43)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 2.XX e page 41 of 276 ^
Review SS Map values after purge:
Source Sensor Full Power Volts 10 volts [need 3 rd Source Sensor Card for Channels 5 & 6]
Source Sensor Max P o w e r Value 0.0% Channel 5 Start Mode OFF
Source Sensor Analog Out put Chnl 1 (Channel Select) Channel 5 Fail Action Mode NONE
Master Tooling Value 100.0% Channel 5 Backup List 0
Minimum Start Xtal Channels 1 channel Channel 5 Tooling Value 100.0%
Minimum Backup Xtal Channels 0 channels Channel 5 Weight 100.0%
Minumum Active Xtal Channels 1 channel Channel 6 Start Mode OFF
Xtal Channel Drop Filter NONE Channel 6 Fail Action Mode NONE
Indexer Synchronization Mode NONE Channel 6 Backup List 0
Indexer Synchronization Time 2 sec ond s Channel 6 Tooling Value 100.0%
Channel 1 Start Mode OFF Channel 6 Weight 100.0%
Channel 1 Fail Action Mode NONE [need 4 th Source Sensor Card for Channels 7 & 8]
Channel 1 Backup List 0 Channel 7 Start Mode OFF
Channel 1 Tooling Value 100.0% Channel 7 Fail Action Mode NONE
Channel 1 Weight 100.0% Channel 7 Backup List 0
Channel 2 Start Mode OFF Channel 7 Tooling Value 100.0%
Channel 2 Fail Action Mode NONE Channel 7 Weight 100.0%
Channel 2 Backup List 0 Channel 8 Start Mode OFF
Channel 2 Tooling Value 100.0% Channel 8 Fail Action Mode NONE
Channel 2 Weight 100.0% Channel 8 Backup List 0
[need 2 nd Source Sensor Card for Channels 3 & 4] Channel 8 Tooling Value 100.0%
Channel 3 Start Mode OFF Channel 8 Weight 100.0%
Channel 3 Fail Action Mode NONE
Channel 3 Backup List 0 I/O SETUP values /programs after PURGE:
Channel 3 Tooling Value 100.0%
Channel 3 Weight 100.0% I/O Programs A & B Cleared
Channel 4 Start Mode OFF Memory Menu A
Channel 4 Fail Action Mode NONE Operate Menu Running
Channel 4 Backup List 0
Channel 4 Tooling Value 100.0%
Channel 4 Weight 100.0%
Film parameter differences: factory restore has: max power limit set to 50% (purge = 0%).
Processes Step differences: As an example, the following is the difference between a factory setting and a
purged setting for PROCESS# 3. The factory setting has, for the first and only step (step 01):
MODE=AUTO, FILM#=3, and THICK(Kå)=0.300. The purged setting has an END line as the first and
only step (considered cleared). If process 3 were run with factory settings, AUTO mode would be invoked
using film #3 and running until a final thickness of .300 Kå was achieved.
If process 3 were run with purged settings, the END command would be encountered immediately thus
stopping the process. The table below shows this information as well as information for the other
processes.
Factory Settings table for All Process Numbers:
Proc# 1 Proc#2 Proc#3 Proc# 4 Proc#5 Proc#6 Proc#7 Proc#8 Proc#9
STEP 01 01 01 01 01 01 01 01 01
MODE AUTO AUTO AUTO AUTO AUTO AUTO AUTO AUTO AUTO
FILM#
1 2 3 4 5 6 7 8 9
THICK 0.100 0.200 0.300 0.400 0.500 0.600 0.700 0.800 0.900
All factory Processes have END as STEP 02.