INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 237)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 235 of 276 ^
72 CILK22 See CILK00.
73 CILK23 See CILK00.
74 CILK24 See CILK00.
75 CILK25 See CILK00.
76 CILK26 See CILK00.
77 CILK27 See CILK00.
78 CILK28 See CILK00.
79 CILK29 See CILK00.
80 RLSSKHLD Release from a soak hold condition. Trigger of this event releases
a film FSM to leave soak hold and go on to rise/soaks as needed.
81 RSYNC_PG
1
Pocket good, gun1.
82 RSYNC_PG
2
Pocket good, gun2.
83 RSYNC_PG
3
Pocket good, gun3.
84 RSYNC_PG
4
Pocket good, gun4.
85 RSYNC_PG
5
Pocket good, gun5.
86 RSYNC_PG
6
Pocket good, gun6.
87 RSYNC_PG
7
Pocket good, gun7.
88 RSYNC_PG
8
Pocket good, gun8.
89 REVERIFY Trigger a request for MEAS to re-scan map matrix
90 ZROTK_SS
1
Thickness zero, chnl1.
91 ZROTK_SS
2
Thickness zero, chnl2.
92 ZROTK_SS
3
Thickness zero, chnl3.
93 ZROTK_SS
4
Thickness zero, chnl4.
94 ZROTK_SS
5
Thickness zero, chnl5.
95 ZROTK_SS
6
Thickness zero, chnl6.
96 ZROTK_SS
7
Thickness zero, chnl7.
97 ZROTK_SS
8
Thickness zero, chnl8.
98 CNCLPR_S
S1
Reset output power, gun1.
99 CNCLPR_S
S2
Reset output power, gun2.
100 CNCLPR_S
S3
Reset output power, gun3.
101 CNCLPR_S
S4
Reset output power, gun4.
102 CNCLPR_S
S5
Reset output power, gun5.
103 CNCLPR_S Reset output power, gun6.