INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 219)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 217 of 276 ^
Parameter 33 Sensor 4 thickness
access index: THICK4 thick from sensor.
Value Range 0 To 999,999
Units Angstroms
Thickness from sensor 4. 4 of 8 in a contiguous block. Associated card needs to be physically installed and
enabled before a reboot.
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Parameter 34
Sensor 5 thickness
access index: THICK5 thick from sensor.
Value Range 0 To 999,999
Units Angstroms
Thickness from sensor 5. 5 of 8 in a contiguous block. Associated card needs to be physically installed and
enabled before a reboot.
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Parameter 35
Sensor 6 thickness
access index: THICK6 thick from sensor.
Value Range 0 To 999,999
Units Angstroms
Thickness from sensor 6. 6 of 8 in a contiguous block. Associated card needs to be physically installed and
enabled before a reboot.
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Parameter 36
Sensor 7 thickness
access index: THICK7 thick from sensor.
Value Range 0 To 999,999
Units Angstroms
Thickness from sensor 7. 7 of 8 in a contiguous block. Associated card needs to be physically installed and
enabled before a reboot.
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Parameter 37
Sensor 8 thickness
access index: THICK8 thick from sensor.
Value Range 0 To 999,999
Units Angstroms
Thickness from sensor 8. 8 of 8 in a contiguous block. Associated card needs to be physically installed and
enabled before a reboot.
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Parameter 38
rate from sensor 1
access index: RATE1
Value Range 0 To 9999 [integer]
Units Deci-angstroms/sec
The rate reported from sensor 1 with 9999 representing 999.9 Å/S. 1 of 8 in a contiguous block. Associated
card needs to be physically installed and enabled before a reboot.
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Parameter 39
rate from sensor 2
access index: RATE2
Value Range 0 To 9999 [integer]
Units Deci-angstroms/sec
The rate reported from sensor 2 with 9999 representing 999.9 Å/S. 2 of 8 in a contiguous block. Associated
card needs to be physically installed and enabled before a reboot.
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