INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 11)

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SECTION 1.XX e page 9 of 276 ^
GLOSSARY .............................................................................................................................................. 271
INDEX ....................................................................................................................................................... 273
COPY PARAMETER LISTS .................................................................................................................. 274
FIGURES
Standard Sensors .................................................................................................................................. 20
Sequencing / Non-Sequencing Modes................................................................................................... 23
Process / Film / Map Relationships...................................................................................................... 25
Back Panel Connections (Overview) .................................................................................................... 29
Electrical Connections From Crystal Through Remote Oscillator (Overview) ................................... 30
Input Bd. Jumpers (Overview).............................................................................................................. 33
Installation/Removal Of Back Panel PCB Cards ................................................................................. 35
I/O Programming Notation .................................................................................................................. 44
I/O Programming Description.............................................................................................................. 44
I/O Programming: User Programmable Front Panel Keys/LEDs ....................................................... 45
Example I/O Programs......................................................................................................................... 45
I/O Programming: Modulo 100 Counter Addresses............................................................................. 47
Touch Panel Overlay............................................................................................................................ 49
Front Panel and Key Descriptions ....................................................................................................... 50
Typical RunTime Screen....................................................................................................................... 50
Status Key Screens................................................................................................................................ 51
Manual Mode Screens .......................................................................................................................... 52
Status Screen Selector Function ........................................................................................................... 54
Start Key Menu ..................................................................................................................................... 54
Start (Key) Process Flowchart ............................................................................................................. 55
Menu Tree............................................................................................................................................. 57
RunTime Screen.................................................................................................................................... 58
Main Menu Screen................................................................................................................................ 60
Executive Menu .................................................................................................................................... 62
Films & Process Storage...................................................................................................................... 63
Review Film Menu................................................................................................................................ 64
Non-Sequencing Mode Screen.............................................................................................................. 69
Rate Sampling, Sample And Hold Operation ....................................................................................... 75
Main Process Review/Edit Screen ........................................................................................................ 83
Service Menu, Memory Configurations................................................................................................ 93
Setting the Active Process (Sequencing Mode)..................................................................................... 94
Setting The Active Film (Non-Sequencing Mode.................................................................................. 94
RunTime Screen (Non-Sequencing Mode)............................................................................................ 95
RunTime Screen: L/Q ........................................................................................................................... 96
RunTime Screen: Sample & Hold......................................................................................................... 96
Hand Controller/Pendent ..................................................................................................................... 97
Manual Power Control......................................................................................................................... 98
Typical Run Cycle............................................................................................................................... 101
System Configuration Screens ............................................................................................................ 102
Communications Menu Screen ........................................................................................................... 105
Process Accounting Screens............................................................................................................... 112
Options Info Screens........................................................................................................................... 114
Memory Module.................................................................................................................................. 118
RunTime Screen With Test Mode Enabled ......................................................................................... 122
Electrical Connections To Back Panel ............................................................................................... 135
Crystal Head Mounting ...................................................................................................................... 135