INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 205)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 203 of 276 ^
This parameter is associated with the max. power abort switch parameter and sets the
allowable duration of a maximum power condition before an abort will occur.
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Parameter 28 Shutter Delay Mode Enable
access: SDMD shutter delay mode, on/off
Value Range 0,1
Units 0 is Off, 1 is On
This switch type parameter will allow the shutter delay parameters to become active and
the mode functional on a individual film basis. If set to Off, the parameter window cursor
will not access the associated parameters. If set to On, the delayed shutter operation will
be performed as specified by the following parameters.
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Parameter 29 Shutter Delay Time-Out
access: SDTM time to achieve control without alarm
Value Range 0:01 - 99:59
Units Min:Sec
This parameter sets a time limit for the delayed shutter operation to be completed. The
time period begins at the beginning of the shutter delay cycle. The sensor is exposed to
evaporant with the substrates remaining shielded. When rate control is established to the
programmed accuracy, three things happen. The substrate shutter is opened, accumulated
thickness set to zero, and the programmed deposition profile is then started. If the
specified rate control accuracy cannot be met within this time limit, the deposition will be
aborted.
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Parameter 30 Shutter Delay Quality
access: SDAC shutter delay accuracy factor
Value Range 1 - 50
Units Percent
This parameter sets the rate control accuracy that must be established for a period of five
seconds in order to complete the delayed shutter sequence. The maximum accuracy set
able is 1 percent of the desired setpoint. However, this is internally limited to 1 Å/s.
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Parameter 31 Rate Sampling
access: XSMD crystal sample mode, off/timed/intel
Value Range 0 To 2
Units 0 is Off, 1 is Timed Mode, 2 is Intelligent Mode
This switch type parameter will allow the rate sampling parameters to become active and
the mode functional on an individual film basis. If set to Off the parameter window
cursor will not access the associated parameters. If timed mode is selected, the crystal
sensor will be exposed to evaporant for the time specified by the sample dwell parameter,
and will sample at the interval specified by the sample interval parameter. If intelligent
mode is selected, then the duration of the sample will only be long enough to establish
the desired accuracy.
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Parameter 32 Sample Interval
access: XSTI crystal sample time interval
Value Range 0:01 - 99:59
Units Min:Sec
For either mode of operation this parameter will select the sampling interval of the
sensor.
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