INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 65)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 63 of 276 ^
SECTION 3.4 Films and Processes
STC - 2002 / SQ Film Process Data
FILM # 1 PARAMETERS
FILM # 2 PARAMETERS
FILM # 3 PARAMETERS
FILM # 4 PARAMETERS
FILM # 5 PARAMETERS
FILM # 6 PARAMETERS
FILM # 7 PARAMETERS
FILM # 8 PARAMETERS
FILM # 99 PARAMETERS
PROCESS LIST # 1
PROCESS LIST # 2
PROCESS LIST # 3
PROCESS LIST # 4
PROCESS LIST # 5
PROCESS LIST # 6
PROCESS LIST # 7
PROCESS LIST # 8
PROCESS LIST # 9
RUNTIME
INFORMATION
ACTIVE PROCESS 1-9
USE FILM #
LAYER #
PROCESS RECIPE LIBRARY FILM RECIPE LIBRARY
2 AUTO 2 0.400
1 AUTO 3 0.030
3 WAIT 3 0.600
4 AUTO 2 0.250
Step Mode Film# Thickness KA
UP
TO
99 END
1
3
1
Figure- 3.8: Film & Process Storage.
Films & Processes Description
A deposition process is controlled by the parameters programmed by the user in the film
parameter and process sequencing lists. Figure 3.8, illustrates the film parameter and process data storage
and the relationship to the RunTime mode. The figure shows a process (Process 1) sequencing through the
layers (currently on layer 1) using the parameters of Film 3. The ending thickness for this layer is
determined by the final thickness for step 1 (layer 1) programmed in the process list. Each of the nine
processes can have a different set or arrangement of any or all of the nine films. A process list can
repetitively use a film program for different layers as in the case for layer 1 & 3 of Process 1. The ending
thickness for each layer is independent of the film parameters and determined by the value programmed in
the process list.
SECTION 3.5 Film Edit/Review Mode
Editing Films
The STC-2002 has storage for 99 sets of film parameters (99 films). Depending on the system and
hardware configurations, up to 42 parameters per film can be stored. On the MAIN MENU, the Review
Film key provides entry into the menu area containing all film edit/review menus. An unprogrammed unit
will start with film 1 selected. When is the REVIEW FILM key pressed, this brings into view the film
parameter list which was last selected as the film to review or edit on the last numeric entry screen. The
film number that is currently being viewed and can potentially be edited, is indicated on the top line of the
display (menu path/status/ID line) in the form EDIT x, where x is the film now open for viewing/editing.
If the film number that is displayed when is the REVIEW FILM key pressed is not the film needed for
viewing/editing, press the GO2 FLM (go to film) key to bring forth the numeric entry screen. This is simply
a vehicle used to go to the film number as indicated by the entered number. This may or may not be the
active film, that is, the current film that is in use. The Active Film number value can be seen, as was the
edit film number, on the top line of the REVIEW FILM menu screen in the form ACTIVE x, where x is the
film now active for a starting process. The Active Film number value is also indicated on the RunTIme
screen [ FILM __ ]. To edit or review a different film while on the REVIEW FILMS menu , press the GO2
FLM key again and change digit[s] as required. The alternate film number will be selected whereupon
editing/reviewing can commence on the subsequent menu screens as well as on the REVIEW FILM menu.
The GO2 FLM key thus provides lateral navigation from film to film on that menu level.
To reiterate,