INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 204)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 202 of 276 ^
This parameter sets the duration of the rate ramp. The rate ramp starts at the rate control
value at the time that the rate ramp trigger is reached and ends at the value set by the new
Dep rate parameter.
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Parameter 21 Rate Ramp Trigger
access: RRTG rate ramp thickness trigger
Value Range 0 - 999.999
Units Kilo angstroms
This parameter sets the trigger point for a rate ramp to begin during deposit.
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Parameter 22
Ctl Loop -P-
access: PROP control loop proportional term gain
Value Range 1 - 9999
Units None
This parameter sets the closed loop rate control proportional gain.
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Parameter 23
Ctl Loop -I-
access: INTG control loop integral term
Value Range 0.0 - 99.9
Units Seconds
This parameter sets the closed loop rate control integral term time constant.
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Parameter 24 Ctl Loop -D-
access: DRIV control loop derivative term
Value Range 0.0 - 99.9
Units Seconds
This parameter sets the closed loop rate control derivative term time constant.
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Parameter 25 Max. Power Limit
access: MAXP max power limit
Value Range 0.0 - 100.0
Units Percent
This parameter sets the absolute maximum power level that will be allowed to occur at
any time from the instrument (film dependent).
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Parameter 26 Abort Max. Pwr Switch
access: ABMP abort on max power on/off
Value Range 0,1
Units 0 is Off, 1 is On
This parameter is a switch value. When set to Off it has no effect on the deposition
sequence and the programming data window will not access the associated max. power
dwell parameter. When set to on a maximum power condition will be allowed for the
time duration set by the now accessible max. power dwell parameter and then the STC-
2002 will abort the deposition sequence and power will be set to zero.
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Parameter 27 Max. Power Dwell
access: MPTM max power time interval
Value Range 0:0 - 99:59
Units Min:Sec