INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 9)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 1.XX e page 7 of 276 ^
S ECTION 3.15 .......................................................................................................................................... 103
Detailed System Configuration Related Parameters .......................................................................... 103
S ECTION 3.16 .......................................................................................................................................... 105
Communications Configuration Related Parameters......................................................................... 105
Detailed Communications Configuration Related Parameters......................................................................... 106
S ECTION 3.17 .......................................................................................................................................... 108
STC-2002 Crystal Failure Processing................................................................................................ 108
S ECTION 3.18 .......................................................................................................................................... 112
Process Accounting ............................................................................................................................ 112
S ECTION 3.19 .......................................................................................................................................... 114
OPTions/INFo .................................................................................................................................... 114
Checksum Validation ........................................................................................................................ 115
Checksums And Parameters After Purge............................................................................................ 116
S ECTION 3.20 .......................................................................................................................................... 118
Memory Module Programming & Usage ........................................................................................... 118
Memory Module Data Transfer ....................................................................................................................... 120
Memory Module Placement............................................................................................................................. 121
S ECTION 3.21 .......................................................................................................................................... 122
Programming Example....................................................................................................................... 122
Entering The TEST Mode................................................................................................................................ 122
S ECTION 3.22 .......................................................................................................................................... 130
Product Programming Summary........................................................................................................ 130
ELECTRICAL CONNECTIONS AND DESCRIPTIONS [4.XX] ............................... 135
S ECTION 4.0 ............................................................................................................................................ 135
Sensor Head Installation .................................................................................................................... 135
S ECTION 4.1 ............................................................................................................................................ 138
Electrical Connections And Descriptions ........................................................................................... 138
S ECTION 4.2 ............................................................................................................................................ 138
Line Power ......................................................................................................................................... 138
S ECTION 4.3 ............................................................................................................................................ 138
Rack Mounting.................................................................................................................................... 138
S ECTION 4.4 ............................................................................................................................................ 138
Vacuum System Grounding ................................................................................................................ 138
S ECTION 4.5 ............................................................................................................................................ 140
Sensor Connections ............................................................................................................................ 140
S ECTION 4.6 ............................................................................................................................................ 140
Analog Control Voltage Connections................................................................................................. 140
Control Voltage Output Connection................................................................................................... 140
S ECTION 4.7 ............................................................................................................................................ 141
Analog Recorder Output Connection ................................................................................................. 141
Analog Recorder Output Specifications ............................................................................................. 141
S ECTION 4.8 ............................................................................................................................................ 143
I/O Interface ....................................................................................................................................... 143
S ECTION 4.9 ............................................................................................................................................ 146
Relay Outputs (Factory I/O Program) ............................................................................................... 146
S ECTION 4.10 .......................................................................................................................................... 147
Remote Inputs (Factory I/O Program) ............................................................................................... 147
S ECTION 4.11 .......................................................................................................................................... 147
RS-232 Serial Communications Interface........................................................................................... 147
S ECTION 4.12 .......................................................................................................................................... 148
Communications Options ................................................................................................................... 148
I/O PROGRAMMING [5.XX] ..................................................................................................... 149
S ECTION 5.1 ............................................................................................................................................ 149
I/O Programming Introduction .......................................................................................................... 149