INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 224)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 222 of 276 ^
[RZCD_AOK] if proper type # (1..3,17,21,22,23,40,66) id and proper [status_value] was sent.
Exact format of [status_value] depends on the particular status variable for which the data
is being set to.
[RZCD_ILDV] if improper value for parameter arguments.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc.
______________________________________________________________________
______________________________________________________________________
Commands F and G, Status Information Parameters
Parameter 1
Soak Hold Status
Value Range 0,1
Units False/True
This parameter indicates if a soak hold state is requested. A value of 1 returned indicates that it is
requested. A setting of true means that the soak 2 phase will be held overtime and prevented from entering
the deposit phase until the soak-hold is released (made false). This status and others are alterable via G
and/or I/O logic.
access: SKHLD soak hold status control variable, false(0)/true(1) status. program will stop at SOAK
HOLD state prior to deposition if this status was true(1). Requires an event trigger to break out of film hold
(RLSSKHLD event).
0 SKHLD_FALSE
1 SKHLD_TRUE
______________________________________________________________________
Parameter 2
Forced Sample
Value Range 0,1
Units Off / On
This parameter indicates if a forced sample state is in progress. A value of 1 returned indicates that a
forced sample condition is desired. This state can be changed from the computer interface (G2), I/O logic,
or front panel (hold/release ‘8’ key) when on RunTime screen.
access: FORSPL forced sample, false(0)/true(1) status.
0 FORSPL_off
1 FORSPL_on
______________________________________________________________________
Parameter 3
Manual Controller Status
Value Range 0 To 3
Units None
This parameter indicates the last status of the manual hand controller according to the following values:
0 At
Rest
1 Both Up And Down (zero power without aborting)
2 Up
3 Down
These are for simulating the hand controller through the computer interface only. This parameter does not
reflect the physical status of the hand controller.
access: MCTL manual controller status, 0..3 for at rest, Both, Up, Down.
0 MCTL_ATRST
1 MCTL_ZERO
2 MCTL_UP
3 MCTL_DWN
______________________________________________________________________
Parameter 4
Manual Mode Active
Value Range 0,1
Units False/True