INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 76)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 74 of 276 ^
This parameter sets the closed loop rate control derivative term time constant.
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Parameter
MAX POWER LIMIT
Percentage Value; Range is 0.0 - 100.0
Units Percent
Max. Power Limit
This parameter sets the absolute maximum power level that will be allowed to occur at any time
from the instrument (for the current film in use).
Specifically, this parameter selects the maximum percent of power that will be allowed out of the
controlled power supply (named by the SOURCE OUT
PUT CH A N NE L parameter). This parameter and
the Map parameter Source Max Power are redundant but not without good reason. When a process is
running, the lesser value of these two parameters will be used as the limiting value. Maps are intended to be
more closely associated with the source supply in terms of their definition at setup. One map may be called
by many Films and, as a consequence, a Film may inadvertently set the power at a level beyond what is
desirable for the power supply, wiring, etc. This is a fail safe way to limit a power supply configuration in a
place close to the hardware, that is, in a map configuration.
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Parameter
ABORT MAX PWR SW
On/Off Value
Units None
Abort On Max. Power Switch
This parameter is a switch value. When set to Off it has no effect on the deposition sequence and
the programming data window will not access the associated max. power dwell parameter. When set to On
a maximum power condition will be allowed for the time duration set by the now accessible max. power
dwell parameter and then the STC-2002 will abort the deposition sequence and power will be set to zero.
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Parameter
MAX POWER DWELL
Elapsed Time; Range is 0:0 - 99:59
Units Min:Sec
Max. Power Dwell
This parameter is associated with the max. power abort switch parameter and sets the allowable
duration of a maximum power condition before an abort will occur.
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Shutter Delay (has 2 dependent parameters)
This operating mode, if enabled, allows precise rate control to be established before substrates are
exposed. For this capability the sensor must be located on the source side of the substrate shutter. A sensor
shutter may also be used if desired.
Parameter
SHTR DELAY MODE
On/Off
Units None
Enabling Shutter Delay Mode
This switch type parameter will allow the shutter delay parameters to become active and the mode
functional on an individual film basis. If set to Off, the parameter window cursor will not access the
associated parameters. If set to On, the delayed shutter operation will be performed as specified by the
following parameters. [The following 2 parameters are dependent upon this parameter.]
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Parameter
SHTR DLY TIMEOUT
Process Timer; Range 0:01 - 99:59
Units Min:Sec
Shutter Delay Timeout
This parameter sets a time limit for the delayed shutter operation to be completed. The time period
begins at the beginning of the shutter delay cycle. The sensor is exposed to evaporant with the substrates
remaining shielded. When rate control is established to the programmed accuracy, three things happen.