INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 210)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 208 of 276 ^
Parameter 3 Process Run Number
access value: RUNNO run number
Value Range 0 To 9999
Units None
Read or set the run number. The set command is inhibited if a film is running.
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Parameter 4
Password Lock # - Parameters And Executive
access value: LOCKN param & exec lock number
Value Range 0 To 9999
Units None
This allows certain areas of the STC-2002 to be restricted to those people knowing the password code. If
this is programmed with a non-zero value the value enables the password function and is itself the
password. Whenever accessing a menu that can change a parameter, the STC-2002 will ask for the
password.
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Parameter 5
Password Lock # - I/O And Communications
access value: COMLOK I/O and communications lock code
Value Range 0 To 9999
Units None
This allows certain areas of the STC-2002 to be restricted to those people knowing the password code. If
this is programmed with a non-zero value the value enables the password function and is itself the
password. Whenever accessing a menu that can change an I/O programming parameter or a
communications parameter, the STC-2002 will ask for the password.
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Parameter 6 NA access value: OBSO Was control loop polarity
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Parameter 7 Control F.S. Volt Control Loop Full Scale Voltage
access value: OBSO Was control loop full scale volts choice
Value Range 0 , 1 or 2
Units 0 = 2 Volts, 1 = 5 Volts, 2 = 10 Volts
This scales the control voltage of the STC-2002 to match your power supply. While most supplies are set
to -10 volts for full power, not all are. This allows 100% power from the STC-2002 to be either 2, 5, or 10
volts.
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Parameter 8 Rate Direction
access value: OBSO Was rate direction, positive, negative
Value Range 0,1
Units 0 = Positive, 1 = Negative
This parameter sets the STC-2002 for either a deposit mode (positive) or an etch mode (negative).
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Parameter 9
Recorder Function
access value: ARFNC analog recorder function select, ARFC_class RATE/RDEV/PWRL THIK/REMOTE/IOACC/NONE
Value Range 0 To 6
Units 0= Rate, 1= Rate Deviat ion , 2= P o w e r, 3= Thickness, 4= Computer Remote, 5=I/O C on tr o l, 6=Off
There are 2 analog outputs on the STC-2002. One analog output per STC-2002 can be used as a recorder
output (with 1 or more sensor cards). You may program one of seven variables to appear on this output.
These are absolute rate, rate deviation, power, thickness, remote computer or off.
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