INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 242)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 240 of 276 ^
Description: Requests return of information saved during a process run. The STC-2002 saves
information for the last four completed film deposition runs. Each time a new film is completed
the information summary (detailed below) for the run is stored away as the latest result (index 0
for first argument) and the previous latest run (old index 3 before this data log operation
commenced) data is lost. Data recorded as index 0 through 2 before a new run completion are then
accessed by index numbers 1 through 3. Since each log has date/time and run number (and layer
number in the case of sequencing) information stamped with it, tracing which data applies to what
run is simple. The list of processing accounting data element access indices is below.
Returns:
[RZCD_AOK][param_value] if proper log item ident code argument was sent. Exact format of
[param_value] depends on the particular log item for which the data was requested.
[RZCD_ILDV] if improper value for parameter argument.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc.
Read Process Accounting (L)
The set of L commands are used to read the process accounting information from the STC-2002 to
the host computer. There are 2 parameters that are passed. The first is a single digit from 0 through 3.
This indicates which set of parameters is to be read. The number 0 is the most recent and 3 is the oldest.
The second parameter defines what piece of information will be read. Table 6.18 lists the numbers and
parameters.
Process Accounting
Index
Address
/ ID
Mnemonic Description
0 PA_date Date of process run, calendar MM/DD/YY as 6 digits.
1 PA_time Time, clock hrs/mins in military HH:MM .
2 PA_rnno Run #, 0.9999. Followed by 'T' if a test mode run.
3 PA_procid Process #, 1..9 if sequencing, 0 if non-sequencing.
4 PA_lyrn Layer number if sequencing, 1..99, # of step in sequence.
5 PA_flmn Film # , 1..99.
6 PA_map Source-Sensor Map reference number, 1..30.
7 PA_source Source channel for power, 1..8 or 0 if invalid source.
8 PA_pocket Pocket number associated with film. 0..63.
9 PA_tdep Time of shutter open in seconds.
10 PA_ethk Ending thickness.
11 PA_erate Ending rate.
12 PA_pwrv Power value at shutter close.
13 PA_loop Loop accum at shutter close, 0..99.
14 PA_x1use Life reading for xtal 1 at beginning/end.
15 PA_x2use Life reading for xtal 2 at beginning/end.
16 PA_x3use Life reading for xtal 3 at beginning/end.
17 PA_x4use Life reading for xtal 4 at beginning/end.
18 PA_x5use Life reading for xtal 5 at beginning/end.
19 PA_x6use Life reading for xtal 6 at beginning/end.
20 PA_x7use Life reading for xtal 7 at beginning/end.
21 PA_x8use Life reading for xtal 8 at beginning/end
22 PA_tproc Time of process, start to idle or stop.
23 PA_stat Process run completion status, stopped/why, normal idle, tpwr, etc... from
completion status messages below.
0
NORMAL normal completion, reached idle.
1 TIMPWR completed to idle, time power during deposit.
2 BADXTL crystal bad.
3 REMOTE remote from I/O system.