INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 243)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 241 of 276 ^
4 KEYBRD front panel
5 MAXPWR max power condition persisted too long.
6 PENDNT remote pendant stop.
7 SAFE 1 User Interface subsystem failure.
8 S4 BAD Measurement module systems failure
9 IO BAD I/O module/plugin failure.
10 0 BHIE Measurement Bus Hold failure.
11 INDEXR Indexer feedback timeout failure
12 INVSRC Invalid source associated with Map/Film
13 INVSNS Invalid sensor associated with Map.
14 IO_AX1 I/O auxiliary stop 1
15 IO_AX2 I/O auxiliary stop 2
16 IO_AX3 I/O auxiliary stop 3
17 IO_AX4 I/O auxiliary stop 4
18 QUALDLY Failed quality while in shutter delay
19 QUALDEP Failed quality while in deposit
Table 6.18: Process Accounting Id List.
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Command Examples
Command L0
2
Response A1234
Description
Read the 0th (most recent of the four) process log item # 2, the run #. run # 1234 was the
run most recently completed.
Command
L 3 2
Response A ”BLANK” spelled out
Description Read the 3rd (oldest of the four) process log item # 2, the run #. The log has no
information in this entry, fewer than four processes have been logged into the history.
Command L0
14
Response A BADXTL
Description Read the 0th (most recent of the four) process log item # 14, the completion status of the
process. A bad crystal caused the stopping or aborting of the run.
Table 6.19: Group 8 Examples.
Read, Load I/O program Group 9 --
Commands M,N & O
(M) (N) (O) I/O Program Reading And Loading. These commands are used for uploading and
downloading the I/O rungs. These commands are not used for controlling the I/O program, just
getting it in and out of the STC-2002.
M - read I/O rung
N - select I/O rung for change
O - I/O rung data
Load I/O Program (M, N, O)
Read, Load I/O program