INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 84)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 82 of 276 ^
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There are programmable Film and Map parameters that are only viable for particular hardware
configurations. Unless the hardware that is needed to support the programmable parameters is physically
installed and configured appropriately (on the SYSTEM CONFIGURATION menu), the process will not
run and will display various error messages indicating the cause. The SYSTEM CONFIGURATION
menu is accessed through the EXECUTIVE menu which is located on the MAIN menu.
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Examples:
Repaired crystal channels (or channels failed by user programming) must be RE-VERIFY'd on the 2 nd
STATUS screen before they can be recognized as good again.
If the typical PROC ess X: status message does not change when the START key is pressed, check for
"STOP: INV alid XXX " message and check the OPT/INF menu, page 2 for cards not installed
that are enabled in software (MIA). AC Power must be recycled OFF ON to re-sync.
If SRC is zero, this is an indication that a source analog output control voltage has been assigned to a
source sensor card that is not present, not working, etc. Remember that the System Config uration
parameters: Need S ource /S ensor Card X and I/O Slot X type are only evaluated on power up or
on reset. Check the OPT ions /INF o menu, page 2 and 3 to see what is currently in effect. To work
correctly, the S/S x: line should end with OK. If it ends with EMPTY, the card is not present or
not communicating. If the line ends with INCOMPAT
able !, the software versions in at least
some of the various PCB cards is not compatible- check for field changed PCB cards. If the line
ends with MIA, that sensor card is configured but is not physically present. [See OPT
ions /INF o
menu]