INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
3
Select the Crucible Output Type as normally open (NO), or normally closed
(NC).
Example:
Number of crucibles
= 4
Crucible output
= 6
Crucible output type
= NO
For this example, wiring to the controller is based on
and 7 are needed to encode the four possible positions.
NOTE: If the crucible output type were normally closed (NC),
need to be modified by exchanging open and closed.
4
Determine whether Turret Feedback is desired. This allows the turret position
controller to stop further instrument processing until the requested turret
position is satisfied. If chosen, a turret input must be connected to the turret
position controller’s feedback signal.
If Turret Feedback is not chosen, program a Turret Delay Time which allows an
adequate time for positioning to take place. Once the delay time has expired,
instrument state processing continues.
5
The selection of a particular crucible for a layer is defined in the process
directory.
6
Select the process to modify.
7
Program the particular “Crucible Number” for each layer.
Example:
Layer 1:
Crucible Number
= 1
Layer 2:
Crucible Number
= 2
Layer 4:
Crucible Number
= 4
Table 3-4 Wiring To The Controller
Crucible
Position
Contact Status
Relay #6
Relay #7
1
Open
Open
2
Closed
Open
3
Open
Closed
4
Closed
Closed