INFICON IC/5 Thin Film Deposition Controller - Manual (Page 256)

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IC/5 Operating Manual
12.5.4.1 Function Key Selection Choices for
Cross Talk Calibration Select
12.5.5 Cross Talk Calibration Procedural Notes
1 The Calibration thickness values do not include any adjustment for Sensor
Tooling (set in the Material Set-Up display) This is because the cross sensitivity
adjustments are done prior to the sensor tooling being factored into the sensor
rate calculation. The Aggregate Rate, used to control the deposition source,
DOES include the Sensor Tooling factors.
2 During Cross Talk Calibration CALIBRATE, if a Crystal Fail occurs the
calibration is aborted and the power ramp is entered. The user can still enter
the calibration thickness values of the partially completed calibration if desired,
recalibrate with the failed Crystal (CALIBRATE will be set to NO automatically
for the Sensor with the failed crystal), or replace the failed crystal and
recalibrate.
3 If the instrument is set to STOP on MAX POWER in the Utility Set-Up and MAX
POWER is reached, the calibration will be aborted and the Source Power
zeroed. No option of entering the partially completed results is given.
4 When using a Dual Crystal Sensor it is important that the Crystal shutter be
removed during calibration so that material will deposit onto both crystals. An
alternative to removing the crystal shutter is to perform the calibration
procedure allowing only one of the crystals to receive material and then
manually entering this Cal Thickness Value for the secondary sensor. This
manual entry of the Cal Thickness value ignores the tooling difference between
the two crystal positions.
Key Function Description
F3 RECALIBRATE Press this key to recalibrate the Calibration
Thickness values starting at Cross Talk Calibration
MANUAL, rejecting the calculated calibration
thickness values.
F4 ACCEPT Press this key to accept the Calibration Thickness
values and returns to the Cross Talk Calibration
SETUP display. The accepted Calibration Thickness
values are entered into page 3 of the Material Set-Up
display.
F5 REJECT Press this key to reject the Calibration Thickness
values and return to the Cross Talk Calibration
SETUP display.
F6 STOP CALIBRATION Press this key to stop the calibration procedure and
return to the Cross Talk Calibration SETUP display.