INFICON IC/5 Thin Film Deposition Controller - Manual (Page 72)

3 - 20
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
3.3.7 Program Displays
Program displays allow you to program processes and system configuration. Each
program display has a section at the bottom that gives the rate, thickness, power
level, and status of the process running. PROGRAM is divided into five major
categories, with some of these being further subdivided. Each category has a
complete section in this manual detailing the parameters in that category and any
special information needed to navigate those displays. Following is a brief
description of each category, with reference to the appropriate sections of the
manual.
Figure 3-12 Program Display
3.3.7.1 Function Key Selection Choices for the Program Display
F1 MATERIAL DIRECTORY
Material parameters include information specific to a given material to be
deposited. The information includes Z ratio, density, soak times; up to 24
materials can be defined. (See
Chapter 4 .)
F2 PROCESS
The process screens allow the user to program a series of materials into a
multilayer process. Desired rate, final thickness, and other information specific
to each layer is also programmed here. Fifty different processes can be
defined, containing up to a total of 250 layers. (See
Chapter 5 .)
F3 I/O
The I/O category deals with several different external links from the IC/5 to the
vacuum system. This category is divided into the following subcategories, each
accessed by a function key. Refer to the indicated sections for more detailed
information on each subcategory.