INFICON IC/5 Thin Film Deposition Controller - Manual (Page 156)

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IC/5 Operating Manual
7.7.3.2 Query Process Parameters
For each command format the symbol
þ
represents a blank space. The format is:
QP
þ
param#
þ
process#
þ
layer#
This command returns a process parameter or all process parameters for a
specified process and layer.
Table 7-7 Query Process Parameters
param# Process Parameter
0 Material Index
1 Rate
2 Final Thickness
3 Thickness Limit
4 Time Limit
5 Co-Deposition
6 Ratio Control
7 Rate Watch Time
8 Rate Watch Accuracy
9 Crucible
10 New Rate 1
11 Start Ramp 1
12 Ramp Time 1
13 New Rate 2
14 Start Ramp 2
15 Ramp Time 2
99 All Parameters; each separated by a space in the above
order.