INFICON IC/5 Thin Film Deposition Controller - Manual (Page 171)

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IC/5 Operating Manual
5
System Messages - Returns a variable length string
listing message numbers corresponding to the
status messages on the instrument. (This sequence
may be repeated if there is more than one message
code returned.) See Section 13.1 for error message
descriptions.
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xx
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Response codes to SG 05 Command:
Message # System Messages
0 NO SYSTEM
MESSAGES
30 XTAL FAIL
31 MAX. POWER
REACHED
33 XTAL SWITCHING
34 SWITCHER FAIL
35 AUTOTUNE FAILURE
36 AUTOTUNE TIMEOUT
37 AUTOTUNE
SUCCESSFUL
38 UNABLE TO AUTO Z
41 SAMPLE
42 HOLD
43 DELAY
44 AUTOTUNE MAX.
POWER
45 RATE ABOVE MAX.
46 SPEED TEST
47 FAST SYSTEM
48 SLOW SYSTEM
Table 7-19 Status Command SG
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global_status_code
Code# Global Condition Response Format