INFICON IC/5 Thin Film Deposition Controller - Manual (Page 71)

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IC/5 Operating Manual
3.3.6 Cross Talk and Calibration Display
Cross talk calibration is used during co-deposition to correct for material from one
source being deposited onto sensors used to control the second co-deposited
material’s source.
When using multiple sensors and multiple sources it can be very difficult to
empirically determine the required cross talk corrections. The following series of
functions enables an automatic determination of cross talk values.
Figure 3-11 Cross Talk Calibration Display
The Cross Talk Calibration Display provides for initiation of the automatic cross talk
calibration algorithm to determine the calibration thicknesses (CAL THICK). The
CAL THICK values are entered into page 3 of the Material Definition Display. These
values are used during co-deposition to correct for material from one source being
deposited onto the sensors used to control the second co-deposited material’s
source.
A calibration is done on each material to be co-deposited. See section 12.5 on
page 12-4 for a detailed description of cross talk calibration.