INFICON IC/5 Thin Film Deposition Controller - Manual (Page 111)

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IC/5 Operating Manual
Chapter 5
Process Set-Up
5.1 Process Set-Up Overview
The IC/5 is capable of storing the descriptions and parameters for up to fifty
processes. Processes are made of sequential layers of materials. The layers may
be allocated to any process, but the total number that can be defined is limited to
250 layers. A layer or sequence of layers may be copied up to 99 times, provided
the maximum number of layers is not exceeded.
Process layer definition includes the specification of a previously defined material
(See
Chapter 4, Material Set Up ), deposition rate, thickness and time limits and
rate ramps. The co-deposition capability of the IC/5 allows establishing material
ratio and cross-sensitivity relationships.
Processes are defined by sequencing layers. Layers must be defined sequentially
starting with Layer 1. Defined layers may be inserted, deleted or copied using the
LAYER EDITING feature.
Figure 5-1 Display Tree for Process Set Up
Process Set-Up is initiated by selecting the PROCESS Directory function (key F2)
in the Program display. This will invoke the Process Directory (see
Figure 5-2 ).
Upon entry to the Process Directory, the cursor will be placed at the last referenced
process.
PROGRAM
PROCESS DIRECTORY
PROCESS
LAYER EDITING
COPY
DELETE
TAG/UNTAG