INFICON IC/5 Thin Film Deposition Controller - Manual (Page 244)

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IC/5 Operating Manual
Table 11-3 Input/Relay Pin Connections
I/O Board #1 I/O Board #2
Relay # Pins TTL
Input #
Pin Relay # Pins TTL
Input #
Pin
1 7, 6 1 15 9 7, 6 15 15
2 9, 8 2 14 10 9, 8 16 14
3 11, 10 3 13 11 11, 10 17 13
4 13, 12 4 12 12 13, 12 18 12
5 5, 4 5 11 13 5, 4 19 11
6 3, 2 6 10 14 3, 2 20 10
7 1, 14 7 9 15 1, 14 21 9
8 15, 16 8 8 16 15, 16 22 8
9 7 23 7
10 6 24 6
11 5 25 5
12 4 26 4
13 3 27 3
14 2 28 2
GND 1 GND 1
I/O Board #3
Relay # Pins TTL
Output #
Pin
17 7, 6 25 9
18 9, 8 26 10
19 11, 10 27 11
20 13, 12 28 12
21 5, 4 29 13
22 3, 2 30 14
23 1, 14 31 15
24 15, 16 32 1
33 2
34 3
35 4
36 5
37 6
38 7
GND 8