INFICON IC/5 Thin Film Deposition Controller - Manual (Page 177)

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IC/5 Operating Manual
10 Crystal position. The value of w will be a “G” for a
good crystal, an “F” for a failed crystal, an “I” for an
invalid frequency reading and an “x” indicates the
sensor is not in use. When using a CrystalSix
sensor, the value of P indicates the current crystal
position. If a single or dual sensor head is in use the
value of P will be a one.
wwwwwwww
þ
P
þ
P
þ
P
þ
P
þ
P
þ
P
þ
11 Datalog string. This command will return the datalog
string for the layer specified. This string will be
returned in the comma delimited format. Data is
available for the last two layers completed
12 Rate that is displayed on the Operate screen.
The rate field may vary from sx.xxx
þ
to sxxxx.
þ
.
20 Rate deviation/power output trend. Average values
from the operational screen graph. Format of each
data point, response length varies depending on
number of data points. xxx.xxx
þ
21 Timer tick, Sensor Status, Fundamental frequency
of active sensors. Eight bytes are returned for the
sensor status. Each byte represents the status of
one sensor. A “G” indicates the sensor reading is
valid, an “F” indicates the crystal is failed, an “I”
indicates the frequency reading is invalid, and an “x”
indicates the sensor is not selected.
ttt
þ
wwwwwwww
þ
sxxxxxxx.xx
þ
22 Timer tick, Sensor Status, Anharmonic frequency of
active sensors. Eight bytes are returned for the
sensor status. Each byte represents the status
repeated for each active sensor of one sensor. A “G”
indicates the sensor reading is valid, an “F”
indicates the crystal is failed, an “I” indicates the
frequency reading is invalid, and an “x” indicates the
sensor is not selected.
ttt
þ
wwwwwwww
þ
sxxxxxxx.xx
þ
The sxxxxxx.xx
þ
sequence is repeated for each active sensor.
Table 7-20 Status Command SL
þ
layer_status_code
þ
Layer #
Code Channel Condition Response Format