INFICON IC/5 Thin Film Deposition Controller - Manual (Page 258)

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IC/5 Operating Manual
Figure 12-3 AutoTune Parameters Display
12.6.1 AutoTune Parameters
Refer to Sections section 2.1.7 on page 2-11 and section 12.6.3 on page 12-14 for
a description of AutoTune.
MATERIAL INDEX. . . . . . . . . . . . . . 1 to 24
This parameter is used to select the Material (from the MATERIAL
DIRECTORY) that is to be "AutoTuned". Values range from 1 to 24. The default
value is 1.
DESIRED RATE . . . . . . . . . . . . . . . 0.1 to 999 Å/s
For a Complete Tune, this parameter determines the Rate for which the
AutoTuned control loop parameters will be calculated. For Quick Tune this
parameter is ignored. Values range from 0.1 to 999 Å/s. The default value is
10.0 Å/s.
MAXIMUM RATE. . . . . . . . . . . . . . . 0.2 to 999 Å/s
This parameter is used to set the maximum deposition Rate allowed during an
AutoTune session. The events which occur upon exceeding this value are
dependent upon whether a Quick Tune or a Complete Tune is designated. The
range of values permitted for this parameter is dependent on the value chosen
for the Desired Rate. The maximum allowed value will always be 999 Å/s. The
minimum allowed value is 2 times the Desired Rate value.
QUICK TUNE. . . . . . . . . . . . . . . . . . YES/NO
This parameter is used to choose between a Quick Tune and a Complete Tune.
Permissible values are YES and NO. A value of YES selects Quick Tune. The
default value is YES.
MATERIAL NAME
This is a read-only parameter that identifies the material being deposited.