INFICON IC/5 Thin Film Deposition Controller - Manual (Page 231)

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IC/5 Operating Manual
valve. Canceling these timers ensures those statements dependent on these
timers will not evaluate true if the Abort input were to take place after the timers
were started but prior to their expiring.
Figure 10-42 Statement 38
Statement 38 ensures that the electron beam gun filament voltage and electron
beam gun high voltage relays are deactivated whenever the High Vacuum Valve is
closed.
Figure 10-43 Statement 39
Statement 39 is dependent on the cool down timer, Timer 11. When the cool down
period expires the High Vacuum valve is closed, the “COOL - DOWN CYCLE”
message is removed from the display and replaced with the “VENTING
CHAMBER. message. Also a 5-second delay timer is set and the cool down timer
is canceled.
Figure 10-44 Statement 40
After the high vacuum valve is closed and a 5-second delay timer expires the Vent
valve is turned on.
Figure 10-45 Statement 41
If the chamber is at atmospheric pressure and the system is set for automatic
process control, the Vent valve is turned off and the Alarm relay is activated. The
Alarm relay is activated to indicate to the operator that the vacuum system requires
attention.
Figure 10-46 Statement 42