INFICON IC/5 Thin Film Deposition Controller - Manual (Page 153)

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IC/5 Operating Manual
7.7.3 Query Commands
Query commands are used to request established parameter values. There is a
specific query command for each parameter group. Depending on the actual
hardware configuration, the response to some Query commands may be an ‘E’ nrc
(negative response code) indicating there is no data to retrieve. Each command
has one to three arguments. Each argument is separated by a space. The
command variations include:
7.7.3.1 Query Material Parameters
For each command format the symbol
þ
represents a blank space.
The format is:
QM
þ
param#
þ
material#
This command returns a material parameter or all material parameters for a
specified material.
Table 7-5 Query Commands
command parameter
QM Query Material Parameters
QP Query Process Parameters
QU Query Utility Parameters
QS Query Sensor Parameters
QC Query Source Control Parameters
QL Query Logic Statements
QT Query Output Relay Type
QO Query alphanumeric name of hardware output
QI Query alphanumeric name of hardware input
QN Query User Messages
Table 7-6 Query Material Parameters
param# Material Parameter
0 Compound Name (query only)
1 Density
2 Z-Ratio
3 Source
4 Control Loop
5 Process Gain
6 Primary Time Constant
7 System Dead Time
8 Recorder Output
9 Recorder Function
10 Master Tooling