INFICON IC/5 Thin Film Deposition Controller - Manual (Page 178)

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IC/5 Operating Manual
23 Timer tick, Sensor Status, Fundamental, and
Anharmonic frequencies of active sensors. A
negative value of the last valid frequency reading is
returned when a crystal fail occurs. Eight bytes are
returned for the sensor status. Each byte represents
the status of one sensor. A “G” indicates the sensor
reading is valid, an “F” indicates the crystal is failed,
an “I” indicates the sensor reading is invalid and an
“x” indicates the sensor is not selected.
ttt
þ
wwwwwwww
þ
sxxxxxxx.xx
þ
sxxxxxxx.xx
þ
The sxxxxxx.xx
þ
sxxxxxx.xx
þ
sequence is repeated for each active sensor.
24 Sensor Z-value of active sensors. The value of w will
be a “G” for a good crystal, an “F” for a failed crystal,
an “I” for an invalid reading and an “x” indicates the
sensor is not in use.
wwwwwwww
þ
xxx.xxx
þ
The xxx.xxx
þ
sequence is repeated for each active sensor.
25 Timer tick, Sensor Status, Fundamental frequency,
Anharmonic frequency, Fundamental activity. Eight
bytes are returned for the sensor status. Each byte
represents the status of one sensor. A “G” indicates
the sensor reading is valid, an “F” indicates the
crystal is failed, an “I” indicates the frequency
reading is invalid and an “x” indicates the sensor is
not selected.
ttt
þ
wwwwwwww
þ
sxxxxxxx.xx
þ
sxxxxxxx.xx
þ
xxx
þ
The sequence sxxxxxxx.xx
þ
sxxxxxxx.xx
þ
xxx
þ
is repeated for each active
sensor.
26 Timer tick, Sensor Status, Fundamental frequency,
individual sensor rate of active sensors. Eight bytes
are returned for the sensor status. Each byte
represents the status of one sensor. A “G” indicates
the sensor reading is valid, an “F” indicates the
crystal is failed an “I” indicates the frequency
reading is invalid and an “x” indicates the sensor is
not selected.
ttt
þ
wwwwwwww
þ
sxxxxxxx.xx
þ
sx.xxx
þ
The rate field may vary from sx.xxx
þ
to sxxxx.
þ
.
The sequence sxxxxxxx.xx
þ
sx.xxx
þ
is repeated for each active sensor.
Table 7-20 Status Command SL
þ
layer_status_code
þ
Layer #
Code Channel Condition Response Format