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INFICON IC/5 Thin Film Deposition Controller User Manual

Page 181

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IC/5 Operating Manual

10

Battery Backed RAM Lock On -prevents saving of
parameters to the nonvolatile RAM. Useful to speed
communications when consecutively updating a large
number of parameters. It has no effect on the speed of
communications when querying parameters.
If the instrument loses power while the battery-backed
RAM is locked, any parameters updated during the time
the battery-backed RAM was locked will not be retained.

11

Battery Backed RAM Lock Off - Unlocks the
battery-backed RAM lock and resumes normal operation.

12

Non-Deposit Clock Hold on. “Holds” the state timer during
any non-Deposit state. See Section 6.5.

13

Non-Deposit Clock Hold off. Removes the state timer
“Hold” and resumes normal operation. See Section 6.5

14

Soak Hold 1 on s - Turns on Soak Hold 1 for source s.

15

Soak Hold 1 off s - Turns off Soak Hold 1 for source s.

16

Soak Hold 2 on s - Turns on Soak Hold 2 for source s.

17

Soak Hold 2 off s - Turns off Soak Hold 2 for source s.

18

User Message on mm - Turns on User Message mm.

19

User Message off mm - Turns off User Message mm.

20

Delete material vv. Removes material vv from the material
directory. This command is valid only if the material being
deleted is not used in any process.

21

Name Material vvv uuu. Give material number vvv the
name corresponding to material library entry uuu. Library
entries range from 0 (Ag) to 255 (USER), with numbers
corresponding to the alphabetical listing in the library. The
density and z-ratio will be changed accordingly. This
command can be used to change the name of any defined
material or can be used to define the first undefined
material in the Material Directory. After its definition the
material can have its parameter values changed and may
be called out in a process’ layer definition using the UM
and UP series of commands. See Appendix A for Material
Table.

22

Add layer vvv. Will define the next undefined layer in
process vvv, giving it all default parameters.

23

Insert layer uuu vvv. Will insert a layer immediately before
layer vvv of process uuu.

24

Delete layer uuu vvv. Will delete layer vvv of process uuu.

Table 7-21 REMOTE Commands—Global (continued)

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Global Action