INFICON IC/5 Thin Film Deposition Controller - Manual (Page 196)

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IC/5 Operating Manual
RECORDER FUNCTION
This parameter determines the function of the Sensor’s recorder output. Values
range from 0 to 4, 6 to 9.
0 . . . . . . indicates the function is Sensor Rate in the range of 0 to 100 Å/s.
1 . . . . . . is for Sensor Rate in the range of 0 to 1000 Å/s.
2 . . . . . . is for Sensor Thickness in the range of 0 to 100 Å.
3 . . . . . . is for Sensor Thickness in the range of 0 to 1000 Å.
4 . . . . . . is for rate deviation on a scale of +/- 50 Å/s.
6 . . . . . . is for Sensor Rate in the range of 0 to 10 Å/s.
7 . . . . . . is for Sensor Rate in the range of 0 to 50 Å/s.
8 . . . . . . is for Sensor Thickness in the range of 0 to 5000 Å.
9 . . . . . . is for Sensor Rate in the range of 0 to 1 Å/s.
8.5 DAC Output Selection Rules
The six DAC outputs located on the back of the IC/5 may be used for either Source
Control Outputs, Sensor Recorder Outputs, or Aggregate Rate Recorder Output.
Since these outputs can be set-up for different functions certain rules apply.
1 No DAC output can be set-up as both a recorder output and a source output. If
this is attempted the error message Set as Source Out or Set as Recorder Out
will be displayed.
2 A DAC output cannot be set-up for more than one source. If this is attempted
the error message Set as Source Out will be displayed.
3 A DAC output can be set-up for more than one recorder output including any
combination of Aggregate Rate/Thickness or Sensor Rate/Thickness.
4 If a DAC output is set-up for multiple recorder outputs that are required to be
operative at the same time the error message Recorder Conflict will appear.
This is a non-fatal error (i.e., it will not cause the IC/5 to STOP) and the
message will remain until the conflict is resolved or a STOP takes place.
The priority of a recorder output that is in conflict is:
a. Aggregate Rate/Thickness on the Primary Layer (the first of two
co-deposited layers).
b. Aggregate Rate/Thickness on the Secondary Layer (the second of two
co-deposited layers).
c. Sensor Rate/Thickness on the Primary Layer (from sensors 1 to 8).
d. Sensor Rate/Thickness on the Secondary Layer (from sensors 1 to 8).
5 A STOP will occur if a Layer is started and the Source designated for that Layer
does not have a DAC output defined (i.e., the Source DAC OUTPUT parameter
is 0). The error message “STOP—No source DAC" will be displayed.
6 For a Sensor’s Recorder Output to be active it must be associated with an
active Material.