INFICON IC/5 Thin Film Deposition Controller User Manual

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IC/5 Operating Manual

3.3.3.2 Function Key Selection Choices for

the Sensors Display

F1 CRYSTAL SWITCH

To initiate a crystal switch for the sensor number selected, press function key
F1. The crystal switch will be done on the sensor indicated by the box cursor.
Use the cursor arrow keys to position the box cursor.

F2 ROTATE XTAL HEAD

If the sensor number chosen is a CrystalSix or rotary sensor type, press
function key F2 to sequentially rotate the sensor head through all six positions.
This is useful to initialize a CrystalSix or rotary sensor after replacing failed
crystals. The action is taken on the sensor indicated by the box cursor. For the
rotary sensor, a readout of failed (F) and good (G) crystals is shown in the lower
left hand portion of the display. This readout assists the user in knowing which
crystals are good and which are failed relative to the current position of the
rotary sensor. This information is not retained upon leaving the SENSORS
display. To re-gain this information, press the Rotate Xtal Head function key
again.

F3 TEST XIU

Initiates the XIU self test. The XIU self test determines whether the crystal
interface unit (XIU) and measurement card pair is operating properly.

NOTE: For the XIU self test to work properly, the XIU must have the six inch

BNC cable (IPN 755-257-G6) attached and must be disconnected from
the sensor feedthrough.

F4 CLEAR QUALITY STABILITY

To clear the Quality and Stability counters for the sensor chosen by the box
cursor, press function key F4.

F6 OPERATE

To return to the Operate display, press function key F6.