INFICON IC/5 Thin Film Deposition Controller - Manual (Page 165)

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IC/5 Operating Manual
7.7.4.4 Update Sensor Parameters
For each command format the symbol
þ
represents a blank space.
The format is:
US
þ
param#
þ
sensor#
þ
value
This command changes the value of a sensor parameter. See Chapter 8,
Source/Sensor Set-Up , for parameter value ranges.
7.7.4.5 Update Source Parameters
For each command format the symbol
þ
represents a blank space.
The format is:
UC
þ
param#
þ
source#
þ
value
This command changes the value of a source control parameter. See Chapter 8,
Source/Sensor Set-Up for parameter value ranges.
Table 7-15 Update Sensor Parameters
param# Sensor Parameter
0 Type
1 Xtal Switch Output
2 Xtal Shutter Output
3 Xtal Shutter Type
4 Z-Ratio Type
5 Recorder Output
6 Recorder Function
Table 7-16 Update Source Parameters
param# Source Parameter
0 Voltage Range
1 Shutter Output
2 Shutter Output Type
3 Number of Crucibles
4 Crucible Output
5 Crucible Output Type
6 Turret Feedback Value is upper or lower case YES or NO
7 Turret Input
8 Turret Delay
9 DAC Output