INFICON IC/5 Thin Film Deposition Controller - Manual (Page 59)

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IC/5 Operating Manual
Figure 3-4 Display Hierarchy - Operate
OPERATE
CRYSTAL ROTATE TEST
SENSORS
XIU
(F1) (F2) (F3)
RS232
TEST
SYSTEM
STATUS
SOURCE
MAIN
CROSS
TALK
(F1) (F3) (F4) (F5)
SWITCH TOGGLE
SOURCE AUTOTUNE
PARAMETERS
(F1) (F2) (F3) (F4) (F5)
START LEAVE
MANUAL
(F5) (F6)
CRUCIBLE
TOGGLE
SENSOR
SHUTTER
START
MANUAL
SWITCH XTAL
HEAD
CALIBRATE
SHUTTERS POWER
STOP
MANUAL
POWER
START
AUTOTUNE
START
MANUAL
MAIN/DIAG
(F5)
(F6)
PROGRAM (F2)
(F4)
(F5)
(F5)
CALIBRATION
STOP
CALIBRATION