INFICON IC/5 Thin Film Deposition Controller - Manual (Page 214)

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IC/5 Operating Manual
10.3.1 System Equipment List
10.3.1.1 Valves
Foreline . . . . . . . . . . . . . . . . . . . . . . An electro-pneumatically controlled valve
which also contains a position indicator
switch. This switch is closed when the valve
is closed.
Roughing . . . . . . . . . . . . . . . . . . . . An electro-pneumatically controlled valve
which also contains a position indicator
switch. This switch is closed when the valve
is closed.
High Vacuum . . . . . . . . . . . . . . . . . An electro-pneumatically controlled valve
which also contains a position indicator
switch. This switch is closed when the valve
is closed.
Vent Valve . . . . . . . . . . . . . . . . . . . . An electro-pneumatically controlled valve.
10.3.1.2 Switches
Auto/Manual
A key switch that switches power from the manually operated system control
switches to the Automatic position. In the Automatic position power is applied
to one side of the Relays used to control the Foreline, Roughing, Vent, and High
Vacuum valves.
Abort
A momentary contact switch which is Normally Open. This provides contact
closure for the Abort input.
Alarm Answered
A momentary contact switch which is Normally Open. This provides contact
closure for the Alarm Answered input.
Evacuate Chamber
A momentary contact switch which is Normally Open. This provides contact
closure for the Evacuate Chamber input.
Vent Chamber
A momentary contact switch which is Normally Open. This provides contact
closure for the Vent Chamber input.