INFICON IC/5 Thin Film Deposition Controller - Manual (Page 273)

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IC/5 Operating Manual
STOP - SENSOR CONFLICT
Indicates the instrument is stopped because the process is trying to enter the
DEPOSIT state with both layers using the same sensor.
STOP - SHUTTER DELAY
Indicates the instrument has been in shutter delay for more than 60 seconds
without achieving rate control to within 5% of the desired deposition rate.
STOP - SOURCE CONFLICT
Indicates the instrument is stopped because a process is trying to START with
two layers using the same source.
STOP - SOURCE SWITCH
Indicates the instrument is stopped due to a source switcher mechanical
failure.
STOP - SWITCHER FAIL
Indicates the instrument is in the STOP state due to a CrystalSix sensor
switcher failure.
STOP - TIME POWER
Indicates the instrument is in the STOP state because a layer completed in
Time Power.
STOP - XTAL FAIL
Indicates the instrument is in the STOP state due to a crystal fail while in pre-
or post-deposit, or while in deposit.
SWITCHER FAIL
Indicates that a mechanical failure of the crystal switcher has been detected.
SWITCHER ERR XTAL #
When using a CrystalSix sensor head, this error indicates the crystal position
signal could not be detected at the number indicated. The absence of the
position signal indicates a faulty CrystalSix sensor head and this position can
no longer be accessed. The instrument will allow operation of a CrystalSix
sensor having a bad position provided there are not two bad positions in a
row. Two bad positions in a row will result in a Switcher Fail error message.
SWITCH IN PROGRESS
A crystal switch cannot be done unless the previous crystal switch is
completed. A crystal switch is in progress until the XTAL SWITCHING
message is taken down.
TEST
Indicates the instrument is in TEST mode as determined in Utility Set-Up.
2 TAGS ALREADY SET
While editing a layer this message indicates an attempt to Tag a layer after
having already tagged two layers.