INFICON IC/5 Thin Film Deposition Controller - Manual (Page 254)

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IC/5 Operating Manual
12.5.1.1.1 Function Key Selection Choices for
Cross Talk Calibration Setup
12.5.2 Cross Talk Calibration MANUAL display
Upon pressing the START MANUAL function key from the SETUP display, the IC/5
enters the Manual state, allowing manipulation of the source power level using the
Hand-Held Controller. This is used to prepare the source for calibration. Bring the
source power level to a point where the deposition rate is stable and approximately
the rate at which you wish to calibrate.
12.5.2.1 Function Key Selection Choices for
Cross Talk Calibration Manual
Key Function Description
F5 START MANUAL Press this key to place the IC/5 into the MANUAL
state. This allows manipulation of the source power
using the Hand Held Controller. Upon entering the
MANUAL state, Source and Sensor shutters will
activate. Rates and Thicknesses for each of the
sensors being calibrated will also be displayed. The
Aggregate Rate, Thickness, and
% Power are also displayed.
F6 MAIN/DIAG Press this key to return to the
Maintenance/Diagnostics display.
Key Function Description
F5 START CALIBRATION When the power level and rates are stable press the
F5 key (START CALIBRATION) to enter the
automatic calibration portion of Cross Talk
Calibration.
F6 LEAVE MANUAL Press this key to leave the Cross Talk Calibration
Manual display and return to the Cross Talk
Calibration Setup display.