INFICON IC/5 Thin Film Deposition Controller - Manual (Page 77)

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IC/5 Operating Manual
3.4.3 Pre-conditioning a Layer
It may be desirable to prepare a layer for deposition while the previous layer is in
progress. Pressing START while a layer is running will begin the pre-deposition
states of the next layer. However, there are certain restrictions and some
precautions should be taken.
1 The next layer cannot use the same source as the current layer. Pressing
START will cause a source conflict and the process will STOP. If
pre-conditioning is desired, be sure the sources defined in the two consecutive
layers are different.
2 The next layer will enter DEPOSIT while the current layer is in DEPOSIT
(co-deposition) unless a Soak Hold is activated. A Soak Hold will hold the
pre-deposition at the chosen Soak Power level until ready to proceed. To set
these up, see
Chapter 6 .
NOTE: If a Soak Hold is not active and two layers attempt to enter DEPOSIT using
some of the same sensors, a STOP sensor conflict will occur.