INFICON IC/5 Thin Film Deposition Controller - Manual (Page 299)

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IC/5 Operating Manual
Appendix A
Material Table
A.1 Introduction
The following table represents the content of the instrument's material library. The
list is alphabetical by chemical formula.
CAUTION
Some of these materials are toxic. Please consult the
material safety data sheet and safety instructions before
use.
Remote Communications Responses and Commands use the code value to
represent a specific material. An * is used to indicate that a Z-ratio has not been
established for a certain material. A value of 1.000 is defaulted in these situations.
Table A-1 Material Table
Code Formula Density Z-Ratio Material Name
0 Ag 10.500 0.529 Silver
1 AgBr 6.470 1.180 Silver Bromide
2 AgCl 5.560 1.320 Silver Chloride
3 Al 2.700 1.080 Aluminum
4 Al
2
O
3
3.970 0.336 Aluminum Oxide
5 Al
4
C
3
2.360 *1.000 Aluminum Carbide
6 AIF
3
3.070 *1.000 Aluminum Fluoride
7 AIN 3.260 *1.000 Aluminum Nitride
8 AlSb 4.360 0.743 Aluminum Antimonide
9 As 5.730 0.966 Arsenic
10 As
2
Se
3
4.750 *1.000 Arsenic Selenide
11 Au 19.300 0.381 Gold
12 B 2.370 0.389 Boron
13 B
2
0
3
1.820 *1.000 Boron Oxide
14 B
4
C 2.370 *1.000 Boron Carbide
15 BN 1.860 *1.000 Boron Nitride
16 Ba 3.500 2.100 Barium