INFICON IC/5 Thin Film Deposition Controller - Manual (Page 225)

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IC/5 Operating Manual
Figure 10-19 Statements 14 and 15
Statements 14 and 15 are designed to keep the Ion Gauge emission turned on in
the event an electron beam gun arc or other electrical noise turns off the Ion Gauge
emission.
Figure 10-20 Statement 16
Statement 16 ensures the Ion Gauge emission is turned off whenever the High
Vacuum Valve is closed. Timer 7 is canceled to ensure that Statement 13 (i.e.
turning on the Ion Gauge) can not be evaluated true after Statement 16 is evaluated
true.
Figure 10-21 Statement 17
This Statement activates the Vent Valve Relay only if the High Vacuum Valve is
closed. The intention is to prevent an accidental venting of the Vacuum Chamber
while under high vacuum. If the high vacuum valve is open, Statement 6 will close
the valve and Statement 17 will not be evaluated true. Therefore, if the high vacuum
valve is open it will take 2 Vent Chamber inputs to activate the vent valve. The
dependence on Statement 3 prevents the Vent Chamber input from being
evaluated unless the system is ready for automatic process control.
Figure 10-22 Statement 18
Statement 18 monitors the Chamber at Atmosphere input from the Gauge and
turns off the Vent Valve when the chamber reaches atmospheric pressure.
Figure 10-23 Statement 19