beautypg.com

INFICON IC/5 Thin Film Deposition Controller User Manual

Page 272

background image

13 - 8

IP

N 07

4-

23

7A

E

IC/5 Operating Manual

STOP - COMPLETE TUNE FAIL

Indicates the complete tune portion of AutoTune did not determine reliable
system response results.

STOP - CROSS TALK > 100%

Indicates the instrument is in the STOP state because one (or both) of the
co-deposited Layers has a Cross Talk percentage greater than 100%. Refer to

section 12.5 on page 12-4

for a more detailed description of Cross Talk

Calibration.

STOP - FRONT PANEL

Indicates the front panel STOP key has been pressed.

STOP - HALF RATE FAIL

Indicates AutoTune is unable to vary the source power to obtain half the
desired deposition rate.

STOP - Hand-held

STOP executed from the Hand-Held Controller.

STOP - LOGIC STATEMENT n

STOP executed from Logic Statement n.

STOP - MAX POWER

Indicate the instrument is stopped because Max Power has been exceeded
for over 5 seconds. The Stop on Max Power parameter is entered in Utility
Set-Up.

STOP - MAX POWER ERROR

Indicates AutoTune is unable to finish a Complete Tune without exceeding the
material’s maximum power setting.

STOP - MAX POWER < 5%

AutoTune has stopped because the material’s maximum power setting is less
than 5%. AutoTune maximum power is automatically set at 5% less than the
material maximum power.

STOP - NO SOURCE DAC

Indicates that a DAC output for this material’s source has not been defined.

STOP - POWER LOSS

Indicates the instrument is in the STOP state due to a prior power loss.

STOP - QUICK TUNE FAIL

Indicates the Quick Tune portion of AutoTune did not get repeatable system
response results.

STOP - RATE TOO LOW

AutoTuning is terminated when the deposition rate at the start of tuning is
below 0.1 A/s.