INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
STOP - COMPLETE TUNE FAIL
Indicates the complete tune portion of AutoTune did not determine reliable
system response results.
STOP - CROSS TALK > 100%
Indicates the instrument is in the STOP state because one (or both) of the
co-deposited Layers has a Cross Talk percentage greater than 100%. Refer to
for a more detailed description of Cross Talk
Calibration.
STOP - FRONT PANEL
Indicates the front panel STOP key has been pressed.
STOP - HALF RATE FAIL
Indicates AutoTune is unable to vary the source power to obtain half the
desired deposition rate.
STOP - Hand-held
STOP executed from the Hand-Held Controller.
STOP - LOGIC STATEMENT n
STOP executed from Logic Statement n.
STOP - MAX POWER
Indicate the instrument is stopped because Max Power has been exceeded
for over 5 seconds. The Stop on Max Power parameter is entered in Utility
Set-Up.
STOP - MAX POWER ERROR
Indicates AutoTune is unable to finish a Complete Tune without exceeding the
material’s maximum power setting.
STOP - MAX POWER < 5%
AutoTune has stopped because the material’s maximum power setting is less
than 5%. AutoTune maximum power is automatically set at 5% less than the
material maximum power.
STOP - NO SOURCE DAC
Indicates that a DAC output for this material’s source has not been defined.
STOP - POWER LOSS
Indicates the instrument is in the STOP state due to a prior power loss.
STOP - QUICK TUNE FAIL
Indicates the Quick Tune portion of AutoTune did not get repeatable system
response results.
STOP - RATE TOO LOW
AutoTuning is terminated when the deposition rate at the start of tuning is
below 0.1 A/s.