INFICON IC/5 Thin Film Deposition Controller - Manual (Page 105)

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IC/5 Operating Manual
SOAK POWER 2 . . . . . . . . . . . . . . . 0.0 to 99.9%
This parameter sets the power level at which the rate from the source very
nearly matches the desired deposition Rate. Values range from 0.0 to 99.9%.
The default value is 0%.
RISE TIME 2 . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
This parameter sets the time period in which the instrument linearly ramps the
power level from Soak Power 1 to Soak Power 2. Values range from 00:00 to
99:59 minutes:seconds. The default value is 00:00.
SOAK TIME 2 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
This parameter sets the time period for which the instrument holds the power
level at Soak Power 2. Values range from 00:00 to 99:59 minutes:seconds. The
default value is 00:00.
AUTO SOAK 2 . . . . . . . . . . . . . . . . . YES/NO
The Auto Soak 2 option, when enabled, calculates an average power setting
over the last few seconds of the DEPOSIT state. This average power replaces
the value programmed in Soak Power 2 so the next time this material is
executed, the Soak Power 2 level is the Auto Soak 2 value. In this manner the
Soak Power 2 value closely matches the power level required to achieve the
desired deposition rate. The power is averaged over the last 2.5 seconds of the
deposition. The default value is NO.
DELAY OPTION. . . . . . . . . . . . . . . . 0,1,2,3
0 = no delay chosen. The default value is 0.
1 = Shutter Delay state immediately following Soak Power 2 and preceding
DEPOSIT. The source shutter relay remains in its normal state and the crystal
shutter relay is active. The sensor, which must be positioned to sample the
source flux with the source shutter closed, provides closed loop rate control.
The rate control must be within +/-5% or 1 Å/s of the desired deposition rate for
5 seconds before the instrument will enter the DEPOSIT state, opening the
source shutter and thus exposing the substrate to a well controlled rate of
evaporant flux. If the required rate control accuracy cannot be achieved within
60 seconds the process will STOP.
2 = Control Delay state. Control delay suspends control loop action on the
source control power for the time interval programmed in Control Delay Time.
During Control Delay, the source and sensor shutters are activated.
3 = Instrument will first enter a shutter delay state followed by the control delay
state.