INFICON IC/5 Thin Film Deposition Controller - Manual (Page 175)

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IC/5 Operating Manual
SL
þ
layer_status_code
þ
Layer #
These commands are used to determine the condition of started layers. For
example: SL 1 1 will return the current Rate for Layer 1.
For the Response Formats: x represents a number (if the value being returned
does not occupy the entire width, blanks are added to the left); s represents the
sign (only a negative sign is displayed, a blank is returned in this position if the
value is positive); t represents the timer tick value; w represents the sensor status
byte and
þ
represents a blank.
11
Defined Material Count
The value returned indicates the number of
materials that are defined. xx
12 Timer Tick and the delta fundamental frequency for
all eight sensors. 1-9 returned for a positive change.
A-I returned for a negative change. 0 returned for no
change. ttttxxxxxxxx
Table 7-20 Status Command SL
þ
layer_status_code
þ
Layer #
Code Channel Condition Response Format
0 Process information. All the information for codes 1
to 9
1 Rate (Å/s) currently read. (Raw reading) sx.xxxb to
sxxxx.b sx.xxx
þ
to sxxxx.
þ
2 Power (%) currently read.
þ
xx.xxx
þ
3 Thickness (KÅ) currently accumulated sxxx.xxx
þ
4 State currently in progress.
þ
xx
þ
Response Codes to SL 04 Layer # Command.
State# State in Process
0 READY
1 SOURCE SWITCH
2 RISE 1
3 SOAK 1
4 RISE 2
5 SOAK 2
6 SHUTTER DELAY
7 DEPOSIT
(before any rate ramps)
Table 7-19 Status Command SG
þ
global_status_code
Code# Global Condition Response Format