INFICON IC/5 Thin Film Deposition Controller User Manual

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IC/5 Operating Manual

IDLE RAMP TIME . . . . . . . . . . . . . . 00:00 to 99:59 min:sec

This is the time interval over which the source power is ramped linearly from
the power level at the end of Deposit (or Feed Power if one is set) to Idle Power.
Values range from 00:00 to 99:59 minutes:seconds. The default value is 00:00.

OPTION . . . . . . . . . . . . . . . . . . . . . . 0 to 4

This parameter determines which of the sensor inputs are to be used for the
material being deposited. Up to 8 sensors may be used to control an
“aggregate” rate. The aggregate rate is determined from averaged rate
information at each sensor scaled by the sensor tooling and sensor weight
parameters. The standard IC/5 includes sensor channels 1 and 2. The unit will
support 6 additional sensor channels with the addition of optional measurement
cards.

The sensor option parameter of the Material Set-Up display allows the ability to:

0 . . . . Turn off the use of this sensor
1 . . . . STOP if this is the last sensor to fail during deposition
2 . . . . Go to TIME POWER if this is the last sensor to fail during deposition
3 . . . . STOP when this sensor fails
4 . . . . Go to TIME POWER if this sensor fails

NOTE: When using either the double start (i.e., pressing the START key twice)

or the codeposition feature, a sensor may not be used by two layers
each in Deposit at the same time. If this is attempted, a sensor conflict
error will occur and the instrument will enter the STOP state. If one
layer is in either a pre-Deposit or post-Deposit state, and the other
layer in Deposit, the layer in Deposit has use of the sensor. Once both
layers are started, a sensor cannot be enabled if it is used by the other
material.

If the sensor OPTION is changed, the subsequent aggregate rate will be
affected only if the option is changed from zero to non-zero (addition of the
sensor’s rate information), or from non-zero to zero (removal of the sensor’s
rate information). Remember, the aggregate rate is a weighted average of the
sensors’ rate information that have a non-zero sensor OPTION.

NOTE: The parameter change affects only the aggregate rate calculation. The

aggregate thickness accumulated thus far is not affected by the
addition or removal of a sensor.